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[phietch]

Hi all,

we are working on plasma etching processes and we have developed a simulation tool for feature scale plasma etching, called phietch (φetch). phietch links the fluxes of neutral and charged species in the bulk of a plasma reactor with the profile evolution of etched features. The user can define the surface chemistry, the interaction of each species with each material of the etched structure. The etched features can be long trenches or axisymmetric holes.

More information and a demo version of the tool can be found at www.phietch.org or www.phietch.gr